Journal: Nanophotonics

Article Title: A universal metasurface transfer technique for heterogeneous integration

doi: 10.1515/nanoph-2022-0627

Figure Lengend Snippet: Metalens simulation and design. (a) Transmittance and (b) phase shift maps of the periodic TiO2 nanodisk arrays as a function of geometrical parameters radius and gap on a glass substrate. (c) Phase shift as a function of nanodisk radius for a given pitch of 340 nm on a glass substrate. (d) Transmittance and (e) phase shift maps of the periodic TiO2 nanodisk arrays as a function of geometrical parameters radius and gap on a 100-nm-thick SiNx membrane. (f) Phase shift as a function of nanodisk radius for a given pitch of 290 nm on a 100-nm-thick SiNx membrane. (g) Schematic diagram of metalens on membrane and its design parameters. The designed NA is 0.18. (h) Meta-atoms are selected from the library to fit the target phase profile of a convex lens.

Article Snippet: The suspended SiNx membrane was a TEM grid purchased from SPI Supplies, Inc.

Techniques:

Journal: Nanophotonics

Article Title: A universal metasurface transfer technique for heterogeneous integration

doi: 10.1515/nanoph-2022-0627

Figure Lengend Snippet: Fabrication and transfer process flow. (a) Si substrate with a 400-nm GeO2 is used for TiO2 metasurface fabrication. (b) PMMA film is spincoated and baked to encapsulate the fabricated metalens, followed by mounting kapton tapes onto the edges of sample. (c) The sample is immersed in DI water dissolving GeO2 and releasing the encapsulated metalens. (d) Top: the floating encapsulated metalens is transferred onto the target substrate. Bottom: optical image of encapsulated metalens being transferred onto a target substrate, a suspended SiNx membrane with 100 nm thickness on a Si frame. (e) Top: the metalens is aligned on top of the target substrate and baked to improve adhesion. Bottom: optical images of encapsulated metalens forming conformal contact with the target substrate. (f) Top: the PMMA is dissolved by acetone completing the transfer process. Bottom: optical image of an example of the post-transfer metasurface arrays on a SiNx membrane.

Article Snippet: The suspended SiNx membrane was a TEM grid purchased from SPI Supplies, Inc.

Techniques:

Journal: Nanophotonics

Article Title: A universal metasurface transfer technique for heterogeneous integration

doi: 10.1515/nanoph-2022-0627

Figure Lengend Snippet: Comparison of metalens before and after transfer. (a) Optical images of the metalens arrays transferred onto a SiNx membrane. Bottom left: imaged using white light. Bottom right: imaged using monochromatic light at 532 nm wavelength. (b) Scanning electron microscopic (SEM) image of the metalens before and after transfer onto a SiNx membrane. (c) Comparison of the meta-atom positions before and after transfer.

Article Snippet: The suspended SiNx membrane was a TEM grid purchased from SPI Supplies, Inc.

Techniques: